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Zhurnal Tekhnicheskoi Fiziki, 2022, Volume 92, Issue 8, Pages 1107–1112
DOI: https://doi.org/10.21883/JTF.2022.08.52770.118-22 (Mi jtf7403) 		 
This article is cited in 1 scientific paper (total in 1 paper)

XXVI International Symposium "Nanophysics and nanoelectronics", N.Novgorod, 14 - 17 March 2022
Plasma

Research and creation of broadband X-ray mirrors with a spectral transmission band coinciding with emission lines and the possibility of filtering

S. A. Garakhin, I. S. Dubinin, S. Yu. Zuev, V. N. Polkovnikov, N. I. Chkhalo

Institute for Physics of Microstructures, Russian Academy of Sciences, 603087 Nizhny Novgorod, Russia
Full-text PDF (409 kB) Citations (1)
DOI: https://doi.org/10.21883/JTF.2022.08.52770.118-22
Abstract: The article considers broadband multilayer X-ray mirrors based on Mo/Be and Mo/Si structures with a transmission band coinciding with the Si $L\alpha$ (13.5 nm) and Sn (13.5 nm) emission lines. The described structures are of great interest for the currently developed liquid source of EUV radiation, since they make it possible to increase the efficiency of the source-X-ray optical system due to the “complete” capture of emission lines.
Keywords: extreme ultraviolet radiation, emission spectrum, laser spark, multilayer X-ray mirror.
Funding agency Grant number
Russian Foundation for Basic Research 20-02-00708
Ministry of Science and Higher Education of the Russian Federation 0030-2021-0022
The study was supported by RFBR grant 20-02-00708 and State Assignment 0030-2021-0022.
Received: 27.04.2022
Revised: 27.04.2022
Accepted: 27.04.2022
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: S. A. Garakhin, I. S. Dubinin, S. Yu. Zuev, V. N. Polkovnikov, N. I. Chkhalo, “Research and creation of broadband X-ray mirrors with a spectral transmission band coinciding with emission lines and the possibility of filtering”, Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1107–1112
Citation in format AMSBIB
\Bibitem{GarDubZue22}
\by S.~A.~Garakhin, I.~S.~Dubinin, S.~Yu.~Zuev, V.~N.~Polkovnikov, N.~I.~Chkhalo
\paper Research and creation of broadband X-ray mirrors with a spectral transmission band coinciding with emission lines and the possibility of filtering
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2022
\vol 92
\issue 8
\pages 1107--1112
\mathnet{http://mi.mathnet.ru/jtf7403}
\crossref{https://doi.org/10.21883/JTF.2022.08.52770.118-22}
\elib{https://elibrary.ru/item.asp?id=48645843}
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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