Zhurnal Tekhnicheskoi Fiziki
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive
Guidelines for authors

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS


Zhurnal Tekhnicheskoi Fiziki:
Year:
Volume:
Issue:
Page:
Find




Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register

Zhurnal Tekhnicheskoi Fiziki, 2022, Volume 92, Issue 8, Pages 1179–1184
DOI: https://doi.org/10.21883/JTF.2022.08.52780.124-22 (Mi jtf7413) 		 
XXVI International Symposium "Nanophysics and nanoelectronics", N.Novgorod, 14 - 17 March 2022
Physics of Nanostructures

Ru/Sr multilayer mirrors for the spectral range 9–12 nm

R. A. Shaposhnikov, S. Yu. Zuev, V. N. Polkovnikov, N. N. Salashchenko, N. I. Chkhalo

Institute for Physics of Microstructures, Russian Academy of Sciences, 607680 Nizhny Novgorod, Russia
Full-text PDF (558 kB)
DOI: https://doi.org/10.21883/JTF.2022.08.52780.124-22
Abstract: The results of studies of Ru/Sr multilayer mirrors optimized for the working wavelength range of 9–12 nm are presented in the paper. Within the framework of the presented article the strontium based multilayer structures with stable over time reflective characteristics were obtained for the first time. It is shown that Ru/Sr mirrors have the highest reflectance of all known reflective coatings, with the exception of beryllium-containing, in the spectral range of 9–12 nm.
Keywords: multilayer X-ray mirrors, X-ray lithography, X-ray radiation.
Funding agency Grant number
Ministry of Science and Higher Education of the Russian Federation 075-15-2021-1350
The study was carried out with the financial support of the Russian Federation represented by the Ministry of Science and Higher Education, agreement No.075-15-2021-1350 dated October 5, 2021 (internal number 15.SYN.21.0004).
Received: 06.05.2022
Revised: 06.05.2022
Accepted: 06.05.2022
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: R. A. Shaposhnikov, S. Yu. Zuev, V. N. Polkovnikov, N. N. Salashchenko, N. I. Chkhalo, “Ru/Sr multilayer mirrors for the spectral range 9–12 nm”, Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1179–1184
Citation in format AMSBIB
\Bibitem{ShaZuePol22}
\by R.~A.~Shaposhnikov, S.~Yu.~Zuev, V.~N.~Polkovnikov, N.~N.~Salashchenko, N.~I.~Chkhalo
\paper Ru/Sr multilayer mirrors for the spectral range 9--12 nm
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2022
\vol 92
\issue 8
\pages 1179--1184
\mathnet{http://mi.mathnet.ru/jtf7413}
\crossref{https://doi.org/10.21883/JTF.2022.08.52780.124-22}
\elib{https://elibrary.ru/item.asp?id=48645853}
Linking options:
  • https://www.mathnet.ru/eng/jtf7413
  • https://www.mathnet.ru/eng/jtf/v92/i8/p1179
    • Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Zhurnal Tekhnicheskoi Fiziki Zhurnal Tekhnicheskoi Fiziki
     
      Contact us:
    		  Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2025