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Zhurnal Tekhnicheskoi Fiziki, 2022, Volume 92, Issue 8, Pages 1207–1212
DOI: https://doi.org/10.21883/JTF.2022.08.52785.102-22 (Mi jtf7418) 		 
This article is cited in 1 scientific paper (total in 1 paper)

XXVI International Symposium "Nanophysics and nanoelectronics", N.Novgorod, 14 - 17 March 2022
Photonics

Prospective wavelengths for projection lithography uing synchrotron radiation

N. I. Chkhalo, V. N. Polkovnikov, N. N. Salashchenko, R. A. Shaposhnikov

Institute for Physics of Microstructures, Russian Academy of Sciences, 607680 Nizhny Novgorod, Russia
Full-text PDF (322 kB) Citations (1)
DOI: https://doi.org/10.21883/JTF.2022.08.52785.102-22
Abstract: Promising wavelengths for next-generation lithography with a wavelength shorter than 13.5 nm based on a synchrotron X-ray source are discussed. Theoretical and experimental values of the reflection coefficients of multilayer X-ray mirrors providing the maximum reflectivity in the range of 11.4–3.1 nm are presented. The theoretical efficiency of multilayer optics is compared for different wavelengths.
Keywords: X-ray lithography, multilayer X-ray optics, multilayer X-ray mirrors.
Funding agency Grant number
Ministry of Science and Higher Education of the Russian Federation 075-15-2021-1350
The study was carried out with the financial support of the Russian Federation represented by the Ministry of Science and Higher Education, agreement № 075-15-2021-1350 dated 5 October 2021. (internal number 15.SYN.21.0004).
Received: 26.04.2022
Revised: 26.04.2022
Accepted: 26.04.2022
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: N. I. Chkhalo, V. N. Polkovnikov, N. N. Salashchenko, R. A. Shaposhnikov, “Prospective wavelengths for projection lithography uing synchrotron radiation”, Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1207–1212
Citation in format AMSBIB
\Bibitem{ChkPolSal22}
\by N.~I.~Chkhalo, V.~N.~Polkovnikov, N.~N.~Salashchenko, R.~A.~Shaposhnikov
\paper Prospective wavelengths for projection lithography uing synchrotron radiation
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2022
\vol 92
\issue 8
\pages 1207--1212
\mathnet{http://mi.mathnet.ru/jtf7418}
\crossref{https://doi.org/10.21883/JTF.2022.08.52785.102-22}
\elib{https://elibrary.ru/item.asp?id=48645858}
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    • This publication is cited in the following 1 articles:
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