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Zhurnal Tekhnicheskoi Fiziki, 2022, Volume 92, Issue 12, Pages 1943–1950
DOI: https://doi.org/10.21883/jtf.2022.12.53761.141-22 (Mi jtf7505) 		 
This article is cited in 2 scientific papers (total in 2 papers)

Physical electronics

Preferential sputtering of alloys by gas cluster ions

V. S. Chernysha, A. E. Ieshkina, D. S. Kireeva, D. K. Minnebaeva, E. A. Skrylevab, B. R. Senatulinb

a Lomonosov Moscow State University, 119991 Moscow, Russia
b National University of Science and Technology «MISIS», 119049 Moscow, Russia
Full-text PDF (540 kB) Citations (2)
DOI: https://doi.org/10.21883/jtf.2022.12.53761.141-22
Abstract: Topography and composition of the surface of nickel-based alloys under irradiation with Ar$_{2500}^+$ cluster ions with the energy of 20 keV, and atomic Ar$^+$ ions with the energy of 3 keV have been studied. It has been experimentally found that the surface of the alloys is depleted by a component with a lower binding energy. It is shown that the change in the surface concentrations of the alloy components upon irradiation with cluster ions is an order of magnitude greater than upon sputtering with atomic ions. The degree of change in the surface composition is determined by the ratio of the sputtering yields of the alloy components.
Keywords: gas cluster ions, ion sputtering, XPS, preferential sputtering, surface topography.
Funding agency Grant number
Russian Science Foundation 21-19-00310
Ministry of Science and Higher Education of the Russian Federation 075-15-2021-696
The work was supported by the Russian Science Foundation, project № 21-19-00310, https://rscf.ru/en/project/21-19-00310/. When performing the study, the equipment of the Center for the Collective Use of MISiS “Materials Science and Metallurgy” (project № 075-15-2021-696) was used.
Received: 19.05.2022
Revised: 25.06.2022
Accepted: 18.08.2022
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. S. Chernysh, A. E. Ieshkin, D. S. Kireev, D. K. Minnebaev, E. A. Skryleva, B. R. Senatulin, “Preferential sputtering of alloys by gas cluster ions”, Zhurnal Tekhnicheskoi Fiziki, 92:12 (2022), 1943–1950
Citation in format AMSBIB
\Bibitem{CheIesKir22}
\by V.~S.~Chernysh, A.~E.~Ieshkin, D.~S.~Kireev, D.~K.~Minnebaev, E.~A.~Skryleva, B.~R.~Senatulin
\paper Preferential sputtering of alloys by gas cluster ions
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2022
\vol 92
\issue 12
\pages 1943--1950
\mathnet{http://mi.mathnet.ru/jtf7505}
\crossref{https://doi.org/10.21883/jtf.2022.12.53761.141-22}
\elib{https://elibrary.ru/item.asp?id=49959379}
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    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Zhurnal Tekhnicheskoi Fiziki Zhurnal Tekhnicheskoi Fiziki
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