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Zhurnal Tekhnicheskoi Fiziki, 2015, Volume 85, Issue 2, Pages 107–111 (Mi jtf7692)  
This article is cited in 17 scientific papers (total in 17 papers)

Physics of nanostructures

Thermal oxidative degradation of molybdenum films under laser ablation

A. V. Volkovab, N. L. Kazanskiiab, O. Yu. Moiseeva, S. D. Poletayevab

a Image Processing Systems Institute, Russian Academy of Sciences, Samara
b Samara State Aerospace University
Full-text PDF (162 kB) Citations (17)
Abstract: The problems of laser ablation of molybdenum films that are related to the formation of topological patterns of contact masks are discussed. The thermal oxidative degradation of thin molybdenum films under high-intensity laser irradiation is analyzed. The results of theoretical estimations are compared with the Raman data on the chemical composition of molybdenum oxide.
Received: 30.04.2014
English version:
Technical Physics, 2015, Volume 60, Issue 2, Pages 265–269
DOI: https://doi.org/10.1134/S1063784215020255
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Volkov, N. L. Kazanskii, O. Yu. Moiseev, S. D. Poletayev, “Thermal oxidative degradation of molybdenum films under laser ablation”, Zhurnal Tekhnicheskoi Fiziki, 85:2 (2015), 107–111; Tech. Phys., 60:2 (2015), 265–269
Citation in format AMSBIB
\Bibitem{VolKazMoi15}
\by A.~V.~Volkov, N.~L.~Kazanskii, O.~Yu.~Moiseev, S.~D.~Poletayev
\paper Thermal oxidative degradation of molybdenum films under laser ablation
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2015
\vol 85
\issue 2
\pages 107--111
\mathnet{http://mi.mathnet.ru/jtf7692}
\elib{https://elibrary.ru/item.asp?id=24195998}
\transl
\jour Tech. Phys.
\yr 2015
\vol 60
\issue 2
\pages 265--269
\crossref{https://doi.org/10.1134/S1063784215020255}
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    • This publication is cited in the following 17 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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