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Zhurnal Tekhnicheskoi Fiziki, 2015, Volume 85, Issue 10, Pages 101–104 (Mi jtf7912)  
This article is cited in 6 scientific papers (total in 6 papers)

Physics of nanostructures

Determination of thickness of ultrathin surface films in nanostructures from the energy spectra of reflected electrons

S. Yu. Kupreenkoa, N. A. Orlikovskyb, E. I. Raua, A. M. Tagachenkovc, A. A. Tatarintsevb

a Lomonosov Moscow State University
b Insitute of Physics and Technology, Institution of Russian Academy of Sciences, Moscow
c Institute of Nanotechnologies of Microelectronics, Russian Academy of Sciences
Full-text PDF (416 kB) Citations (6)
Abstract: A new method for determining the thickness of opaque films on bulk substrates is considered in the nanometer size range. The method is based on analysis and measurements of the energy spectra of back-scattered electrons. The thicknesses of local film nanostructures are determined from the amplitude values of the spectra and from their shift on the energy axis.
Received: 19.02.2015
English version:
Technical Physics, 2015, Volume 60, Issue 10, Pages 1515–1518
DOI: https://doi.org/10.1134/S1063784215100205
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: S. Yu. Kupreenko, N. A. Orlikovsky, E. I. Rau, A. M. Tagachenkov, A. A. Tatarintsev, “Determination of thickness of ultrathin surface films in nanostructures from the energy spectra of reflected electrons”, Zhurnal Tekhnicheskoi Fiziki, 85:10 (2015), 101–104; Tech. Phys., 60:10 (2015), 1515–1518
Citation in format AMSBIB
\Bibitem{KupOrlRau15}
\by S.~Yu.~Kupreenko, N.~A.~Orlikovsky, E.~I.~Rau, A.~M.~Tagachenkov, A.~A.~Tatarintsev
\paper Determination of thickness of ultrathin surface films in nanostructures from the energy spectra of reflected electrons
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2015
\vol 85
\issue 10
\pages 101--104
\mathnet{http://mi.mathnet.ru/jtf7912}
\elib{https://elibrary.ru/item.asp?id=24196220}
\transl
\jour Tech. Phys.
\yr 2015
\vol 60
\issue 10
\pages 1515--1518
\crossref{https://doi.org/10.1134/S1063784215100205}
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    • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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