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Zhurnal Tekhnicheskoi Fiziki, 2015, Volume 85, Issue 10, Pages 155–158 (Mi jtf7924)  
This article is cited in 6 scientific papers (total in 6 papers)

Brief Communications

Violation of the Boltzmann distribution for plasma electron number density in two-chamber inductively coupled plasma discharges

E. A. Bogdanova, A. A. Kudryavtseva, Z. N. Ochikovaa, A. S. Chirtsovb

a Saint Petersburg State University
b St. Petersburg National Research University of Information Technologies, Mechanics and Optics
Full-text PDF (236 kB) Citations (6)
Abstract: It is found for inductively coupled plasma (ICP) discharges in two-chamber structures in which a strong electron temperature gradient can be produced, the classical Boltzmann distribution for the electron number density does not exist even at qualitative level; a more general (extended Boltzmann) distribution for the electron energy density holds with a satisfactory accuracy.
Received: 02.03.2015
English version:
Technical Physics, 2015, Volume 60, Issue 10, Pages 1570–1573
DOI: https://doi.org/10.1134/S1063784215100084
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: E. A. Bogdanov, A. A. Kudryavtsev, Z. N. Ochikova, A. S. Chirtsov, “Violation of the Boltzmann distribution for plasma electron number density in two-chamber inductively coupled plasma discharges”, Zhurnal Tekhnicheskoi Fiziki, 85:10 (2015), 155–158; Tech. Phys., 60:10 (2015), 1570–1573
Citation in format AMSBIB
\Bibitem{BogKudOch15}
\by E.~A.~Bogdanov, A.~A.~Kudryavtsev, Z.~N.~Ochikova, A.~S.~Chirtsov
\paper Violation of the Boltzmann distribution for plasma electron number density in two-chamber inductively coupled plasma discharges
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2015
\vol 85
\issue 10
\pages 155--158
\mathnet{http://mi.mathnet.ru/jtf7924}
\elib{https://elibrary.ru/item.asp?id=24196232}
\transl
\jour Tech. Phys.
\yr 2015
\vol 60
\issue 10
\pages 1570--1573
\crossref{https://doi.org/10.1134/S1063784215100084}
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    • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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