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Zhurnal Tekhnicheskoi Fiziki, 2014, Volume 84, Issue 7, Pages 152–155 (Mi jtf8155)  
This article is cited in 7 scientific papers (total in 7 papers)

Brief Communications

Magnetron sputtering of thin Cu(200) films on Ni(200)/SiO$_2$/Si substrates

A. S. Dzhumaliev, Yu. V. Nikulin, Yu. A. Filimonov

Saratov Branch, Kotel'nikov Institute of Radio-Engineering and Electronics, Russian Academy of Sciences
Full-text PDF (222 kB) Citations (7)
Abstract: The possibility of oriented growth of thin copper films with a (200) texture on a SiO$_2$/Si substrate by magnetron sputtering in medium vacuum is demonstrated for the case when a predeposited nickel layer with a (200) texture serves as an orienting sublayer.
Received: 19.12.2013
English version:
Technical Physics, 2014, Volume 59, Issue 7, Pages 1097–1100
DOI: https://doi.org/10.1134/S106378421407010X
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. S. Dzhumaliev, Yu. V. Nikulin, Yu. A. Filimonov, “Magnetron sputtering of thin Cu(200) films on Ni(200)/SiO$_2$/Si substrates”, Zhurnal Tekhnicheskoi Fiziki, 84:7 (2014), 152–155; Tech. Phys., 59:7 (2014), 1097–1100
Citation in format AMSBIB
\Bibitem{DzhNikFil14}
\by A.~S.~Dzhumaliev, Yu.~V.~Nikulin, Yu.~A.~Filimonov
\paper Magnetron sputtering of thin Cu(200) films on Ni(200)/SiO$_2$/Si substrates
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2014
\vol 84
\issue 7
\pages 152--155
\mathnet{http://mi.mathnet.ru/jtf8155}
\elib{https://elibrary.ru/item.asp?id=22019385}
\transl
\jour Tech. Phys.
\yr 2014
\vol 59
\issue 7
\pages 1097--1100
\crossref{https://doi.org/10.1134/S106378421407010X}
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    • This publication is cited in the following 7 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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