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Zhurnal Tekhnicheskoi Fiziki, 2014, Volume 84, Issue 11, Pages 155–158 (Mi jtf8269)  
This article is cited in 3 scientific papers (total in 3 papers)

Brief Communications

Thickness uniformity of silicon layers grown from a sublimation source by molecular-beam epitaxy

P. B. Boldyrevskiia, A. G. Korovina, S. A. Denisovb, S. P. Svetlovb, V. G. Shengurovb

a National Research Lobachevsky State University of Nizhny Novgorod
b Scientific-Research Physicotechnical Institute at the Nizhnii Novgorod State University, Nizhnii Novgorod
Full-text PDF (168 kB) Citations (3)
Abstract: The thickness distributions of epitaxial layers over the substrate area are experimentally and theoretically studied for deposition from a molecular beam formed by a sublimation source in vacuum. The calculated data agree well with the experimental results for the molecular-beam epitaxy of silicon.
Received: 20.03.2014
English version:
Technical Physics, 2014, Volume 59, Issue 11, Pages 1732–1735
DOI: https://doi.org/10.1134/S1063784214110073
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: P. B. Boldyrevskii, A. G. Korovin, S. A. Denisov, S. P. Svetlov, V. G. Shengurov, “Thickness uniformity of silicon layers grown from a sublimation source by molecular-beam epitaxy”, Zhurnal Tekhnicheskoi Fiziki, 84:11 (2014), 155–158; Tech. Phys., 59:11 (2014), 1732–1735
Citation in format AMSBIB
\Bibitem{BolKorDen14}
\by P.~B.~Boldyrevskii, A.~G.~Korovin, S.~A.~Denisov, S.~P.~Svetlov, V.~G.~Shengurov
\paper Thickness uniformity of silicon layers grown from a sublimation source by molecular-beam epitaxy
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2014
\vol 84
\issue 11
\pages 155--158
\mathnet{http://mi.mathnet.ru/jtf8269}
\elib{https://elibrary.ru/item.asp?id=22019501}
\transl
\jour Tech. Phys.
\yr 2014
\vol 59
\issue 11
\pages 1732--1735
\crossref{https://doi.org/10.1134/S1063784214110073}
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  • https://www.mathnet.ru/eng/jtf/v84/i11/p155
    • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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