Experimental stand for studying the characteristics of powerful laser-plasma sources of EUV radiation

The design and characteristics of a setup for studying powerful laser-plasma sources of extreme ultraviolet radiation are described. A pulsed Nd:YAG laser with a pulse duration of 5.2 ns, pulse energy of up to 0.7 J and a pulse repetition rate of 10 Hz is used to form a laser spark. A supersonic gas jet of Xe formed by a conical nozzle equipped with a pulse valve. The diameter of the critical section of the nozzle is 500 $\mu$m, the length is 5 mm, the half-angle of the cone aperture is 4.5$^\circ$. To study high-power laser-plasma sources, it is planned to equip the setup with conical nozzles with a critical section diameter of 200–300 $\mu$m without a pulse valve and a laser system with a pulse repetition rate of 1 kHz and higher. A high-performance pumping system with a total capacity of 9000 l/s allows maintaining a high vacuum level and conducting research in conditions close to the operating conditions of radiation sources for the new generation of lithographs being designed.