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Zhurnal Tekhnicheskoi Fiziki, 2013, Volume 83, Issue 4, Pages 92–98 (Mi jtf8409)  
This article is cited in 2 scientific papers (total in 2 papers)

Physics of nanostructures

Nanomorphological characteristics of the single-crystal Si(100) surface subjected to microwave plasma processing at weak adsorption

V. Ya. Shanygin, R. K. Yafarov

Saratov Branch, Kotel'nikov Institute of Radio-Engineering and Electronics, Russian Academy of Sciences
Full-text PDF (403 kB) Citations (2)
Abstract: The influence of the conditions and composition of the highly ionized plasma of an electron cyclotron resonance low-pressure microwave gas discharge on the nanomorphology of the single-crystal Si(100) surface is studied. Model mechanisms of the processes controlling the main nanomorphological parameters of silicon crystals subjected to low-energy microwave plasma processing in chemically active and inactive gaseous media under the conditions of weak adsorption are considered.
Received: 02.03.2012
Accepted: 20.07.2012
English version:
Technical Physics, 2013, Volume 58, Issue 4, Pages 557–562
DOI: https://doi.org/10.1134/S1063784213040221
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. Ya. Shanygin, R. K. Yafarov, “Nanomorphological characteristics of the single-crystal Si(100) surface subjected to microwave plasma processing at weak adsorption”, Zhurnal Tekhnicheskoi Fiziki, 83:4 (2013), 92–98; Tech. Phys., 58:4 (2013), 557–562
Citation in format AMSBIB
\Bibitem{ShaYaf13}
\by V.~Ya.~Shanygin, R.~K.~Yafarov
\paper Nanomorphological characteristics of the single-crystal Si(100) surface subjected to microwave plasma processing at weak adsorption
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2013
\vol 83
\issue 4
\pages 92--98
\mathnet{http://mi.mathnet.ru/jtf8409}
\elib{https://elibrary.ru/item.asp?id=20325857}
\transl
\jour Tech. Phys.
\yr 2013
\vol 58
\issue 4
\pages 557--562
\crossref{https://doi.org/10.1134/S1063784213040221}
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    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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