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Zhurnal Tekhnicheskoi Fiziki, 2013, Volume 83, Issue 9, Pages 73–83
(Mi jtf8538)
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This article is cited in 8 scientific papers (total in 8 papers)
Solid-State Electronics
Crystallization and thermochromism of annealed heterostructures containing titanium and tungsten oxide films
V. I. Shapovalova, A. E. Lapshinb, A. E. Komleva, M. Yu. Arsent'evb, A. A. Komleva a Saint Petersburg Electrotechnical University "LETI"
b I. V. Grebenshchikov Institute of Silicate Chemistry of the Russian Academy of Sciences, St. Petersburg
Abstract:
Crystalline phases in heterostructures containing titanium and tungsten oxide films are studied after step annealing in vacuum at temperatures between 500 and 750$^\circ$C. The films are deposited on a silica glass substrate by dc reactive magnetron sputtering. It is found that crystalline phases in single layers and bilayer structures form in a different way. In the latter, crystallization is influenced by the order of layer arrangement on the substrate. Thermochromism in structures annealed in vacuum is due to the oxygen-deficient phase WO$_{3-x}$ belonging to the hexagonal syngony. This phase intensely grows as the temperature rises from 650 to 750$^\circ$C.
Received: 15.05.2012
Citation:
V. I. Shapovalov, A. E. Lapshin, A. E. Komlev, M. Yu. Arsent'ev, A. A. Komlev, “Crystallization and thermochromism of annealed heterostructures containing titanium and tungsten oxide films”, Zhurnal Tekhnicheskoi Fiziki, 83:9 (2013), 73–83; Tech. Phys., 58:9 (2013), 1313–1322
Linking options:
https://www.mathnet.ru/eng/jtf8538 https://www.mathnet.ru/eng/jtf/v83/i9/p73
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