Zhurnal Tekhnicheskoi Fiziki
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive
Guidelines for authors

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS


Zhurnal Tekhnicheskoi Fiziki:
Year:
Volume:
Issue:
Page:
Find




Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register

Zhurnal Tekhnicheskoi Fiziki, 2013, Volume 83, Issue 9, Pages 134–142 (Mi jtf8546)  
This article is cited in 7 scientific papers (total in 7 papers)

Experimental instruments and technique

Investigation of supersmooth optical surfaces and multilayer elements using soft X-ray radiation

M. M. Barysheva, Yu. A. Vainer, B. A. Gribkov, M. V. Zorina, A. E. Pestov, N. N. Salashchenko, N. I. Chkhalo, A. V. Shcherbakov

Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
Full-text PDF (666 kB) Citations (7)
Abstract: The aim of this work is application of soft X-ray diffuse scattering for certification of diffractiongrade optical elements and their substrates at a working wavelength. A device is suggested that allows certification under laboratory conditions owing to a dynamic range approaching that of synchrotron radiation sources. Experimental data are compared with data of alternative methods.
Received: 16.11.2012
English version:
Technical Physics, 2013, Volume 58, Issue 9, Pages 1371–1379
DOI: https://doi.org/10.1134/S1063784213090077
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: M. M. Barysheva, Yu. A. Vainer, B. A. Gribkov, M. V. Zorina, A. E. Pestov, N. N. Salashchenko, N. I. Chkhalo, A. V. Shcherbakov, “Investigation of supersmooth optical surfaces and multilayer elements using soft X-ray radiation”, Zhurnal Tekhnicheskoi Fiziki, 83:9 (2013), 134–142; Tech. Phys., 58:9 (2013), 1371–1379
Citation in format AMSBIB
\Bibitem{BarVaiGri13}
\by M.~M.~Barysheva, Yu.~A.~Vainer, B.~A.~Gribkov, M.~V.~Zorina, A.~E.~Pestov, N.~N.~Salashchenko, N.~I.~Chkhalo, A.~V.~Shcherbakov
\paper Investigation of supersmooth optical surfaces and multilayer elements using soft X-ray radiation
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2013
\vol 83
\issue 9
\pages 134--142
\mathnet{http://mi.mathnet.ru/jtf8546}
\elib{https://elibrary.ru/item.asp?id=20325994}
\transl
\jour Tech. Phys.
\yr 2013
\vol 58
\issue 9
\pages 1371--1379
\crossref{https://doi.org/10.1134/S1063784213090077}
Linking options:
  • https://www.mathnet.ru/eng/jtf8546
  • https://www.mathnet.ru/eng/jtf/v83/i9/p134
    • This publication is cited in the following 7 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Zhurnal Tekhnicheskoi Fiziki Zhurnal Tekhnicheskoi Fiziki
     
      Contact us:
    		  Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2025