Start-phase ionization dynamics in the laser plasma at low gas target densities

In Xe laser-produced-plasma sources of short-wave radiation, the laser-energy-to-EUV conversion efficiency (CE) proves substantially less than theoretical expectations. In the present work, a calculated estimate has been made which indicates that a long period of the primary ionization, lasting up to a moment when high-Z ions appear to emit short-wave photons, can be one of main causes for this. During that period the plasma remains low-ionized and absorbs weakly the laser energy. The estimate above has been experimentally confirmed with spectroscopic data and those on the effective ion charge derived from measured absorption of the laser radiation in the plasma. A preionization of the gas target with an ultraviolet (UV) excimer laser pulse is proposed as a method to accelerate the ionization process and consequently, to enhance CE.