Zhurnal Tekhnicheskoi Fiziki
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive
Guidelines for authors

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS


Zhurnal Tekhnicheskoi Fiziki:
Year:
Volume:
Issue:
Page:
Find




Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register

Zhurnal Tekhnicheskoi Fiziki, 2012, Volume 82, Issue 6, Pages 132–134 (Mi jtf8855)  
This article is cited in 1 scientific paper (total in 1 paper)

Experimental Instruments and Methods

Microdetermination of silicon dioxide on the surface by sensors based on perfluorinated proton-conducting membranes

S. E. Nikitina, E. I. Terukova, S. V. Timofeevb, N. K. Manabaevc

a Ioffe Institute, St. Petersburg
b "Plastpolymer" Joint Stock Company, St. Petersburg
c al-Farabi Kazakh National university, Almaty
Full-text PDF (139 kB) Citations (1)
Abstract: A microdetermination method of silicon dioxide on the silicon surface is studied. In this method, a thin SiO$_2$ layer is dissolved in an aqueous solution of hydrofluoric acid and then the resulting solution is analyzed with sensors based on perfluorinated proton-conducting membranes. Quantitative determination of silicon dioxide remaining on the silicon surface in a quantity as low as 1 $\times$ 10$^{-6}$ mol is demonstrated to be feasible.
Received: 16.08.2011
English version:
Technical Physics, 2012, Volume 57, Issue 6, Pages 865–867
DOI: https://doi.org/10.1134/S1063784212060199
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: S. E. Nikitin, E. I. Terukov, S. V. Timofeev, N. K. Manabaev, “Microdetermination of silicon dioxide on the surface by sensors based on perfluorinated proton-conducting membranes”, Zhurnal Tekhnicheskoi Fiziki, 82:6 (2012), 132–134; Tech. Phys., 57:6 (2012), 865–867
Citation in format AMSBIB
\Bibitem{NikTerTim12}
\by S.~E.~Nikitin, E.~I.~Terukov, S.~V.~Timofeev, N.~K.~Manabaev
\paper Microdetermination of silicon dioxide on the surface by sensors based on perfluorinated proton-conducting membranes
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2012
\vol 82
\issue 6
\pages 132--134
\mathnet{http://mi.mathnet.ru/jtf8855}
\elib{https://elibrary.ru/item.asp?id=20325613}
\transl
\jour Tech. Phys.
\yr 2012
\vol 57
\issue 6
\pages 865--867
\crossref{https://doi.org/10.1134/S1063784212060199}
Linking options:
  • https://www.mathnet.ru/eng/jtf8855
  • https://www.mathnet.ru/eng/jtf/v82/i6/p132
    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Zhurnal Tekhnicheskoi Fiziki Zhurnal Tekhnicheskoi Fiziki
     
      Contact us:
    		  Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2025