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Zhurnal Tekhnicheskoi Fiziki, 2012, Volume 82, Issue 9, Pages 44–48 (Mi jtf8918)  
This article is cited in 8 scientific papers (total in 8 papers)

Optics, Quantum Electronics

Quick ellipsometric technique for determining the thicknesses and optical constant profiles of Fe/SiO$_2$/Si(100) nanostructures during growth

I. A. Tarasovab, N. N. Kosyrevab, S. N. Varnakovab, S. G. Ovchinnikova, S. M. Zharkovac, V. A. Shvetsde, S. G. Bondarenkoa, O. E. Tereshchenkod

a L. V. Kirensky Institute of Physics, Siberian Branch of the Russian Academy of Sciences, Krasnoyarsk
b M. F. Reshetnev Siberian State Aerospace University,
c Siberian Federal University, Krasnoyarsk
d Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
e Novosibirsk State University
Full-text PDF (389 kB) Citations (8)
Abstract: An algorithm is developed to perform rapid control of the thickness and optical constants of a film structure during growth. This algorithm is tested on Fe/SiO$_2$/Si(100) structures grown in an Angara molecular-beam epitaxy setup. The film thicknesses determined during their growth are compared with X-ray spectral fluorescence analysis and transmission electron microscopy data.
Received: 04.10.2011
English version:
Technical Physics, 2012, Volume 57, Issue 9, Pages 1225–1229
DOI: https://doi.org/10.1134/S1063784212090241
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: I. A. Tarasov, N. N. Kosyrev, S. N. Varnakov, S. G. Ovchinnikov, S. M. Zharkov, V. A. Shvets, S. G. Bondarenko, O. E. Tereshchenko, “Quick ellipsometric technique for determining the thicknesses and optical constant profiles of Fe/SiO$_2$/Si(100) nanostructures during growth”, Zhurnal Tekhnicheskoi Fiziki, 82:9 (2012), 44–48; Tech. Phys., 57:9 (2012), 1225–1229
Citation in format AMSBIB
\Bibitem{TarKosVar12}
\by I.~A.~Tarasov, N.~N.~Kosyrev, S.~N.~Varnakov, S.~G.~Ovchinnikov, S.~M.~Zharkov, V.~A.~Shvets, S.~G.~Bondarenko, O.~E.~Tereshchenko
\paper Quick ellipsometric technique for determining the thicknesses and optical constant profiles of Fe/SiO$_2$/Si(100) nanostructures during growth
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2012
\vol 82
\issue 9
\pages 44--48
\mathnet{http://mi.mathnet.ru/jtf8918}
\elib{https://elibrary.ru/item.asp?id=20325676}
\transl
\jour Tech. Phys.
\yr 2012
\vol 57
\issue 9
\pages 1225--1229
\crossref{https://doi.org/10.1134/S1063784212090241}
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    • This publication is cited in the following 8 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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