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Zhurnal Tekhnicheskoi Fiziki, 2012, Volume 82, Issue 9, Pages 101–106
(Mi jtf8927)
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This article is cited in 2 scientific papers (total in 2 papers)
Experimental Instruments and Methods
Sliced linear zone plates for hard X-ray radiation
I. A. Artyukova, V. A. Burtsevb, A. V. Vinogradova, A. Yu. Devizenkoc, N. V. Kalininb, I. A. Kopyletsc, V. V. Kondratenkoc, V. E. Pukhac, B. A. Savitskyc, R. M. Feshchenkoa a P. N. Lebedev Physical Institute, Russian Academy of Sciences, Moscow
b Ioffe Institute, St. Petersburg
c Khar'kov Polytechnical University
Abstract:
Linear zone plates for hard ($E >$ 10 keV) X rays are considered. The technology of the plates includes cutting magnetron-sputtered W$_5$Si$_3$/Si multilayer coatings. The results of numerical computation suggest that this pair of materials provides a high efficiency in the first and second diffraction orders. It is found experimentally that good multilayer structures consisting of several hundreds of layers can be synthesized on silicon and glass substrates. It is shown that they can be cut by ion etching the multilayer coating through a mask.
Received: 12.12.2011
Citation:
I. A. Artyukov, V. A. Burtsev, A. V. Vinogradov, A. Yu. Devizenko, N. V. Kalinin, I. A. Kopylets, V. V. Kondratenko, V. E. Pukha, B. A. Savitsky, R. M. Feshchenko, “Sliced linear zone plates for hard X-ray radiation”, Zhurnal Tekhnicheskoi Fiziki, 82:9 (2012), 101–106; Tech. Phys., 57:9 (2012), 1283–1288
Linking options:
https://www.mathnet.ru/eng/jtf8927 https://www.mathnet.ru/eng/jtf/v82/i9/p101
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