Tensoresistive effect in thin metal films in the range of elastic and plastic strain

The tensoresistive effect in single-layer Cr, Fe, Mo, Ni, and Pd films and double-layer Fe/Cr, Cu/Cr, Ni/Cr, and Pd/Fe films is studied in the range of elastic and plastic strain. The influence of the surface and grain-boundary scatterings of electrons on strain sensitivity $S^{\rho}$ of the single-layer films is analyzed. Sensitivities $S^{\rho}$ of the single- and double-layer films to elastic and plastic strains are compared. It is found that the volume and grain-boundary scatterings of electrons are main contributors to $S^{\rho}$ in the Fe/Cr film system. Grain-boundary scattering is equally effective under elastic and plastic strain, as judged by a high coefficient of electron grain-boundary scattering ($R\cong$ 0.36–0.41).