New opportunities for quantitative analysis as applied to reflected electron energy loss spectroscopy of Fe/Si structures

The feasibility of determining the elemental composition, chemical state, and element distribution across the depth in a subsurface region using the computer simulation of the electron inelastic scattering cross section is demonstrated with iron layers on silicon substrates. Analysis is carried out based on the dielectric theory and on the experimental determination of the product of the electron inelastic mean free path by the inelastic scattering cross section from reflected electron energy loss spectra.