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Mendeleev Communications, 2012, Volume 22, Issue 5, Pages 239–241
DOI: https://doi.org/10.1016/j.mencom.2012.09.003
(Mi mendc2804)
 

This article is cited in 7 scientific papers (total in 7 papers)

Tin(ii) Hexafluoroacetylacetonate as a Precursor in Atmospheric Pressure Chemical Vapour Deposition: Synthesis, Structure and Properties

V. G. Sevastyanov, E. P. Simonenko, P. A. Ignatov, V. S. Popov, A. V. Churakov, N. T. Kuznetsov, V. S. Sergienko

N.S. Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences, Moscow, Russian Federation
Full-text PDF (707 kB) Citations (7)
Abstract: A new method for the synthesis of volatile tin(ii) hexafluoroacetylacetonate [Sn(C5HO2F6)2] was suggested, the compound was characterized by elemental analysis, IR spectroscopy, and DTA/TGA; the crystal structure was established by X-ray diffraction; the morphology and composition of the coating deposited by atmospheric pressure chemical vapour deposition were studied by SEM-EDX and XRD.
Keywords: CVD, tin oxide, films, precursor, tin hexafluoroacetylacetonate.
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Document Type: Article
Language: English


Citation: V. G. Sevastyanov, E. P. Simonenko, P. A. Ignatov, V. S. Popov, A. V. Churakov, N. T. Kuznetsov, V. S. Sergienko, “Tin(ii) Hexafluoroacetylacetonate as a Precursor in Atmospheric Pressure Chemical Vapour Deposition: Synthesis, Structure and Properties”, Mendeleev Commun., 22:5 (2012), 239–241
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  • https://www.mathnet.ru/eng/mendc/v22/i5/p239
  • This publication is cited in the following 7 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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