Simple in situ analysis of metal halide perovskite-based sensor materials using micro X-ray fluorescence and inductively coupled plasma mass spectrometry

A new approach to in situ analysis of the composition of photosensitive metal halide perovskite-based materials for gas sensor has been developed. The concentration of Cs, Pb, Br and I in the ZnO layer was determined by in situ micro X-ray fluorescence method using inductively coupled plasma mass spectrometry for calibration. The relationship ‘synthesis conditions–composition–photoresponse’ of the sensor has been established based on the results obtained.