A. I. Zhmakin, Yu. N. Makarov, “Mathematical modeling of $\mathrm{GaAs}/\mathrm{AlGaAs}$ structures growth processes in flow gas-epitacsial reactors”, Mat. Model., 2:7 (1990), 62

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Matematicheskoe modelirovanie, 1990, Volume 2, Number 7, Pages 62–84 (Mi mm2412)

Mathematical models of phenomena and processes

Mathematical modeling of $\mathrm{GaAs}/\mathrm{AlGaAs}$ structures growth processes in flow gas-epitacsial reactors

A. I. Zhmakin, Yu. N. Makarov

Ioffe Physico-Technical Institute, Russian Academy of Sciences

Full-text PDF (2928 kB)

Abstract: The survey of mathematical models used for numerical investigation of stationary and nonstationary processes in flow gas-epitaxial reactors is given. The models of flow as well as models of mass transfer for structure growing in Al-Ga-As systems are considered.

Received: 21.09.1989

Bibliographic databases:

UDC: 532.516:621.382.002

Language: Russian

Citation: A. I. Zhmakin, Yu. N. Makarov, “Mathematical modeling of $\mathrm{GaAs}/\mathrm{AlGaAs}$ structures growth processes in flow gas-epitacsial reactors”, Mat. Model., 2:7 (1990), 62–84

Citation in format AMSBIB

\Bibitem{ZhmMak90}

\by A.~I.~Zhmakin, Yu.~N.~Makarov

\paper Mathematical modeling of $\mathrm{GaAs}/\mathrm{AlGaAs}$ structures growth processes in flow gas-epitacsial reactors

\jour Mat. Model.

\yr 1990

\vol 2

\issue 7

\pages 62--84

\mathnet{http://mi.mathnet.ru/mm2412}

\zmath{https://zbmath.org/?q=an:0993.82503}

Linking options:

https://www.mathnet.ru/eng/mm2412

https://www.mathnet.ru/eng/mm/v2/i7/p62

Citing articles in Google Scholar: Russian citations, English citations
Related articles in Google Scholar: Russian articles, English articles

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