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Matematicheskoe modelirovanie, 1989, Volume 1, Number 2, Pages 160–164 (Mi mm2523)  
Computational methods and algorithms

A method of data processing for the interferometric control of dissolution of resist film

A. L. Bogdanov, K. A. Valiev, L. V. Velikov, D. Yu. Zaroslov, V. A. Nikitaev, V. E. Tukish
Full-text PDF (480 kB)
Received: 21.10.1988
Bibliographic databases:
UDC: 535.417
Language: Russian
Citation: A. L. Bogdanov, K. A. Valiev, L. V. Velikov, D. Yu. Zaroslov, V. A. Nikitaev, V. E. Tukish, “A method of data processing for the interferometric control of dissolution of resist film”, Mat. Model., 1:2 (1989), 160–164
Citation in format AMSBIB
\Bibitem{BogValVel89}
\by A.~L.~Bogdanov, K.~A.~Valiev, L.~V.~Velikov, D.~Yu.~Zaroslov, V.~A.~Nikitaev, V.~E.~Tukish
\paper A~method of data processing for the interferometric control of dissolution of resist film
\jour Mat. Model.
\yr 1989
\vol 1
\issue 2
\pages 160--164
\mathnet{http://mi.mathnet.ru/mm2523}
\zmath{https://zbmath.org/?q=an:0993.74500}
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