Matematicheskoe modelirovanie
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive
Impact factor

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS


Mat. Model.:
Year:
Volume:
Issue:
Page:
Find




Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register

Matematicheskoe modelirovanie, 2004, Volume 16, Number 6, Pages 28–30 (Mi mm266)  
XII International Conference on Computing Mechanics and Advanced Applied Codes

Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors

Yu. E. Gorbachev, M. A. Zatevakhin, A. A. Ignatyev

Institute for High Performance Computing and Data Bases
Full-text PDF (413 kB)
References:
PDF
HTML
Bibliographic databases:
Language: Russian
Citation: Yu. E. Gorbachev, M. A. Zatevakhin, A. A. Ignatyev, “Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors”, Mat. Model., 16:6 (2004), 28–30
Citation in format AMSBIB
\Bibitem{GorZatIgn04}
\by Yu.~E.~Gorbachev, M.~A.~Zatevakhin, A.~A.~Ignatyev
\paper Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors
\jour Mat. Model.
\yr 2004
\vol 16
\issue 6
\pages 28--30
\mathnet{http://mi.mathnet.ru/mm266}
\zmath{https://zbmath.org/?q=an:1079.76617}
Linking options:
  • https://www.mathnet.ru/eng/mm266
  • https://www.mathnet.ru/eng/mm/v16/i6/p28
    • Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Математическое моделирование
     
      Contact us:
    		  Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2025