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Matematicheskoe modelirovanie, 2001, Volume 13, Number 11, Pages 3–12 (Mi mm802)  
Mathematical model of capacitive discharge with ion-neutral collisions

A. G. Shishkin

M. V. Lomonosov Moscow State University
Full-text PDF (773 kB)
Abstract: The mathematical model of low frequency capacitively coupled gas discharge with ion-neutral collisions is developed. The algorithm of its numerical solution is proposed. The results of numerical calculations for different plasma parameters are given. The main discharge characteristics, viz. potential profile and ion distribution function, are obtained.
Received: 19.04.2001
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Language: Russian
Citation: A. G. Shishkin, “Mathematical model of capacitive discharge with ion-neutral collisions”, Mat. Model., 13:11 (2001), 3–12
Citation in format AMSBIB
\Bibitem{Shi01}
\by A.~G.~Shishkin
\paper Mathematical model of capacitive discharge with ion-neutral collisions
\jour Mat. Model.
\yr 2001
\vol 13
\issue 11
\pages 3--12
\mathnet{http://mi.mathnet.ru/mm802}
\zmath{https://zbmath.org/?q=an:1078.76632}
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