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Nanosystems: Physics, Chemistry, Mathematics, 2024, Volume 15, Issue 5, Pages 643–653
DOI: https://doi.org/10.17586/2220-8054-2024-15-5-643-653 (Mi nano1307) 		 
PHYSICS

Inertial nanostep piezoelectric drive: modeling and experiment

Olga M. Gorbenkoa, Stanislav Y. Lukashenkoa, Stepan V. Pichakhchiab, Ivan D. Sapozhnikova, Mikhail L. Fel'shtyna, Alexander O. Golubokab

a Institute for Analytical Instrumentation of RAS, St. Petersburg, Russia
b St. Petersburg Academic University, St. Petersburg, Russia
Full-text PDF (2688 kB)
DOI: https://doi.org/10.17586/2220-8054-2024-15-5-643-653
Abstract: A vertical inertial nanostep piezoelectric drive is considered. A virtual model was created, and the operating modes of a real drive were studied by numerical experiment. Piezo electromechanical resonance was discovered and a method to eliminate resonant vibrations by increasing electrical losses in the discharge circuit of the piezo actuator capacitance was proposed. A satisfactory agreement between the calculated and experimental data for the drive steps in the nanometer displacement range was obtained.
Keywords: inertial piezoelectric drive, nano positioning system, piezo actuator, piezoelectric effect.
Received: 14.08.2024
Revised: 02.09.2024
Accepted: 03.09.2024
Bibliographic databases:
Document Type: Article
Language: English
Citation: Olga M. Gorbenko, Stanislav Y. Lukashenko, Stepan V. Pichakhchi, Ivan D. Sapozhnikov, Mikhail L. Fel'shtyn, Alexander O. Golubok, “Inertial nanostep piezoelectric drive: modeling and experiment”, Nanosystems: Physics, Chemistry, Mathematics, 15:5 (2024), 643–653
Citation in format AMSBIB
\Bibitem{GorLukPic24}
\by Olga~M.~Gorbenko, Stanislav~Y.~Lukashenko, Stepan~V.~Pichakhchi, Ivan~D.~Sapozhnikov, Mikhail~L.~Fel'shtyn, Alexander~O.~Golubok
\paper Inertial nanostep piezoelectric drive: modeling and experiment
\jour Nanosystems: Physics, Chemistry, Mathematics
\yr 2024
\vol 15
\issue 5
\pages 643--653
\mathnet{http://mi.mathnet.ru/nano1307}
\crossref{https://doi.org/10.17586/2220-8054-2024-15-5-643-653}
\elib{https://elibrary.ru/item.asp?id=74532897}
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