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| Institute for Micro and Nanoelectronic Systems, Karlsruhe University, Germany | |
| Address: | Germany, D-76187, Karlsruhe |
| Phone: | +49 (721) 608 44 961 |
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| Website: | https://www.ims.kit.edu |
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| Personnel: | Siegel, M |
| Tichy, W | |
| von Delft, J | |
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