Application of separating devices for forming multi-component coatings from plasma flow of vacuum arc discharge

A design of a two-cathode magnetoelectric filter has been proposed to reduce the heterophase of the plasma flow during the formation of multicomponent coatings. The effect of the configuration of the magnetic fields of the separator on the spatial distribution of the concentration of elements in a multicomponent plasma flow in a vacuum chamber was experimentally studied. It is shown that when using a separating system with a Y-shaped plasma guide, the control of the ratio of elements in deposited coatings is possible as a result of changing the arrangement of the parts in the vacuum chamber and due to the asymmetry of arc discharge currents on the evaporators.