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Problemy Fiziki, Matematiki i Tekhniki (Problems of Physics, Mathematics and Technics), 2014, Issue 1(18), Pages 21–25
(Mi pfmt283)
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PHYSICS
Influence of thickness on structural properties of annealed $\mathrm{In_2S_3}$ thin films deposited by thermal evaporation
H. Izadneshana, V. F. Gremenokb a Islamic Azad University of Marvdasht, Marvdasht, Iran
b Scientific-Practical Materials Research Centre of the National Academy of Sciences of Belarus, Minsk, Belarus
Abstract:
$\mathrm{In_2S_3}$ thin films of various thicknesses were deposited onto glass substrates by thermal evaporation technique. Thicknesses of $\mathrm{In_2S_3}$ films were defined by controlling the deposition parameters and were $1200$ nm, $470$ nm and $50$ nm. All prepared thin films were annealed at $400^\circ$C for $60$ min. The structural properties and morphology have been studied by $\mathrm{X}$-ray diffraction, Raman spectroscopy and Atomic force microscopy. $\mathrm{X}$-ray diffraction results of $\mathrm{In_2S_3}$ thin films with thicknesses of $1200$ nm and $470$ nm demonstrated peaks revealed in tetragonal structure. Raman spectroscopy shows that the intensity of peaks is affected by the film thickness. The average roughness ($R_a$) and the root mean square roughness ($R_{\text{RMS}}$) increases with thickness. This is associated with the increase of grain size in the $\mathrm{In_2S_3}$ films.
Keywords:
$\mathrm{In_2S_3}$ thin films, thermal evaporation, structural and morphological properties, grain size.
Received: 17.02.2014
Citation:
H. Izadneshan, V. F. Gremenok, “Influence of thickness on structural properties of annealed $\mathrm{In_2S_3}$ thin films deposited by thermal evaporation”, PFMT, 2014, no. 1(18), 21–25
Linking options:
https://www.mathnet.ru/eng/pfmt283 https://www.mathnet.ru/eng/pfmt/y2014/i1/p21
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