|
|
Problemy Fiziki, Matematiki i Tekhniki (Problems of Physics, Mathematics and Technics), 2014, Issue 4(21), Pages 7–9
(Mi pfmt331)
|
|
|
|
PHYSICS
Sources of low-energy charged particle beams
V. A. Gruzdev, V. G. Zalesski, P. N. Soldatenko Polotsk State University, Novopolotsk, Belarus
Abstract:
Some results obtained in the development of low-energy IEP forming electron and ion beams with parameters sufficient for a number of surface modification technologies are presented.
Keywords:
low-energy beams, electron source, electrode structure.
Received: 15.09.2014
Citation:
V. A. Gruzdev, V. G. Zalesski, P. N. Soldatenko, “Sources of low-energy charged particle beams”, PFMT, 2014, no. 4(21), 7–9
Linking options:
https://www.mathnet.ru/eng/pfmt331 https://www.mathnet.ru/eng/pfmt/y2014/i4/p7
|
|