Structure and mechanical properties of carbon coatings alloyed with nitrogen and aluminum

Carbon coatings doped with nitrogen and aluminum were deposited from combined flows of pulsed carbon plasma and aluminum ions generated by a DC arc discharge at a nitrogen partial pressure of 6$\cdot$10$^{-2}$ Pa. The regularities of the influence of conditions and modes of deposition on the phase composition of the carbon matrix and the mechanical properties of the coatings are determined. In the deposition mode (6 Hz, 60 A), the coatings are characterized by the smallest size of Csp$^2$ clusters and their high concentration, which determined their maximum microhardness, high plastic and tribological properties.