Influence of heat treatment on the structure and mechanical properties of carbon coatings doped with zirconium and silicon

The influence of heat treatment modes on the chemical composition, morphological features, and mechanical properties of carbon coatings alloyed with zirconium and silicon was determined. The deposition of coatings was carried out from a plasma flow of complex composition generated by pulsed electric arc and electric spark evaporation. It has been established that heat treatment leads to graphitization of coatings, the formation of ordered sp$^2$-clusters and, as a consequence, an increase in the elastic modulus, a decrease in nanohardness values with their subsequent stabilization during heat treatment above 350$^\circ$ С.