Influence of deposition conditions on the structure and mechanical properties of a-C coatings

Amorphous carbon coatings were formed by the pulsed cathode-arc evaporation method. The dependences of the deposition rate of the phase composition, RMS roughness , and mechanical properties of the coatings on the orientation of the substrate relative to the carbon plasma flow were determined. It was shown that the deposition parameters and coating properties change non-monotonically with increasing angle of incidence of the flow on the substrate. The аnalysis of the AFM data showed the dependence of the RMS roughness of the coatings on the angle of incidence of the flow. The highest content of the sp$^3$-phase, hardness, and elastic modulus are achieved at an angle of incidence of 15$^\circ$.