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Fizika i Tekhnika Poluprovodnikov, 2021, Volume 55, Issue 3, Pages 230–236
DOI: https://doi.org/10.21883/FTP.2021.03.50600.9542 (Mi phts5063) 		 
This article is cited in 3 scientific papers (total in 3 papers)

Surface, interfaces, thin films

Structural features of textured zinc-oxide films obtained by the ion-beam sputtering method

V. G. Kostishina, A. Yu. Mironovicha, A. V. Timofeeva, I. M. Isaeva, R. I. Shakirzyanova, A. I. Rilb, A. A. Sergienkoa

a National University of Science and Technology «MISIS», Moscow, Russia
b Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences, Moscow, Russia
Full-text PDF (1800 kB) Citations (3)
DOI: https://doi.org/10.21883/FTP.2021.03.50600.9542
Abstract: In this work, we studied textured ZnO films obtained by ion-beam deposition. X-ray diffraction patterns and micrographs of the surface revealed that asdeposited films have a polycrystalline structure. It was found that, after annealing of the samples in the temperature range from 200$^{\circ}$C to 500$^{\circ}$, recrystallization occurs, leading to a change in the grain size and surface roughness. The dependence of the initial state of the film on the recrystallization intensity is also demonstrated. In films with an initially more perfect structure, temperature treatment at 500$^{\circ}$C led to grain growth by more than 2 times and a decrease in roughness by $\sim$ 40%.
Keywords: zinc oxide, thin films, crystallographic texture, annealing, film deposition by ion-beam sputtering, atomic force microscopy, X-ray diffractometry.
Received: 26.10.2020
Revised: 30.10.2020
Accepted: 30.10.2020
English version:
Semiconductors, 2021, Volume 55, Issue 3, Pages 308–314
DOI: https://doi.org/10.1134/S106378262103012X
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. G. Kostishin, A. Yu. Mironovich, A. V. Timofeev, I. M. Isaev, R. I. Shakirzyanov, A. I. Ril, A. A. Sergienko, “Structural features of textured zinc-oxide films obtained by the ion-beam sputtering method”, Fizika i Tekhnika Poluprovodnikov, 55:3 (2021), 230–236; Semiconductors, 55:3 (2021), 308–314
Citation in format AMSBIB
\Bibitem{KosMirTim21}
\by V.~G.~Kostishin, A.~Yu.~Mironovich, A.~V.~Timofeev, I.~M.~Isaev, R.~I.~Shakirzyanov, A.~I.~Ril, A.~A.~Sergienko
\paper Structural features of textured zinc-oxide films obtained by the ion-beam sputtering method
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2021
\vol 55
\issue 3
\pages 230--236
\mathnet{http://mi.mathnet.ru/phts5063}
\crossref{https://doi.org/10.21883/FTP.2021.03.50600.9542}
\elib{https://elibrary.ru/item.asp?id=45332269}
\transl
\jour Semiconductors
\yr 2021
\vol 55
\issue 3
\pages 308--314
\crossref{https://doi.org/10.1134/S106378262103012X}
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  • https://www.mathnet.ru/eng/phts/v55/i3/p230
    • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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