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This article is cited in 4 scientific papers (total in 4 papers)
Surface, interfaces, thin films
Photoelectric properties of GaN layers grown by plasma-assisted molecular-beam epitaxy on Si(111) substrates and SiC/Si(111) epitaxial layers
S. A. Kukushkinabc, A. M. Mizerovd, A. S. Grashchenkoa, A. V. Osipovac, E. V. Nikitinad, S. N. Timoshnevd, A. D. Bouravlevd, M. S. Sobolevd a Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, St. Petersburg
b Peter the Great St. Petersburg Polytechnic University
c St. Petersburg National Research University of Information Technologies, Mechanics and Optics
d Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, St. Petersburg
Abstract:
The photoelectric properties of GaN/SiC/Si(111) and GaN/Si(111) heterostructures grown by plasma-assisted molecular-beam epitaxy under the same growth conditions on identical silicon substrates, but with different buffer layers, are experimentally investigated. The GaN/SiC/Si(111) structure is formed on a Si substrate with the SiC buffer layer grown by a new atom-substitution technique and the GaN/Si(111) structure, on a Si substrate subjected to pre-epitaxial plasma nitridation. The significant effect of carbon-vacancy clusters contained in the SiC layer on the growth of the GaN layer and its optical and photoelectric properties is found. It is experimentally established that the GaN/SiC/Si(111) heterostructure has a higher photosensitivity than the GaN/Si(111) heterostructure. In the GaN/SiC/Si(111) heterostructure, the coexistence of two oppositely directed $p$–$n$ junctions is observed. One $p$–$n$ junction forms at the SiC/Si interface and the other, at the GaN/SiC interface. It is shown that the occurrence of an electric barrier in the GaN/Si(111) heterostructure at the GaN/Si(111) heterointerface is caused by the formation of a thin silicon-nitride transition layer during pre-epitaxial plasma nitridation of the Si(111) substrate.
Received: 21.07.2018 Revised: 28.07.2018
Citation:
S. A. Kukushkin, A. M. Mizerov, A. S. Grashchenko, A. V. Osipov, E. V. Nikitina, S. N. Timoshnev, A. D. Bouravlev, M. S. Sobolev, “Photoelectric properties of GaN layers grown by plasma-assisted molecular-beam epitaxy on Si(111) substrates and SiC/Si(111) epitaxial layers”, Fizika i Tekhnika Poluprovodnikov, 53:2 (2019), 190–198; Semiconductors, 53:2 (2019), 180–187
Linking options:
https://www.mathnet.ru/eng/phts5585 https://www.mathnet.ru/eng/phts/v53/i2/p190
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