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Fizika i Tekhnika Poluprovodnikov, 2013, Volume 47, Issue 2, Pages 182–191
(Mi phts7822)
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This article is cited in 9 scientific papers (total in 9 papers)
IX International Conference ''Silicon-2012'', St. Petersburg, July 9-13, 2012
Radiation effects in Si–Ge quantum size structures (review)
N. A. Sobolev Departamento de Fisica & I3N, Universidade de Aveiro, 3810-193, Aveiro, Portugal
Abstract:
The article is dedicated to the review and analysis of the effects and processes occurring in Si–Ge quantum size semiconductor structures upon particle irradiation including ion implantation. Comparisons to bulk materials are drawn. The reasons of the enhanced radiation hardness of superlattices and quantum dots are elucidated. Some technological applications of the radiation treatment are reviewed.
Received: 17.07.2012 Accepted: 20.07.2012
Citation:
N. A. Sobolev, “Radiation effects in Si–Ge quantum size structures (review)”, Fizika i Tekhnika Poluprovodnikov, 47:2 (2013), 182–191; Semiconductors, 47:2 (2013), 217–227
Linking options:
https://www.mathnet.ru/eng/phts7822 https://www.mathnet.ru/eng/phts/v47/i2/p182
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