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Fizika i Tekhnika Poluprovodnikov, 2012, Volume 46, Issue 4, Pages 494–499 (Mi phts8212)  

This article is cited in 2 scientific papers (total in 2 papers)

Surface, interfaces, thin films

Features of electron mobility in a thin silicon layer in an insulator–silicon–insulator structure

A. V. Leonov, A. D. Mokrushin, N. M. Omelyanovskaya

Institute of Microelectronics Technology and High-Purity Materials RAS
Full-text PDF (314 kB) Citations (2)
Abstract: Electron mobility in a thin silicon layer of a metal-insulator-semiconductor-insulator-metal system is studied as a function of longitudinal and transverse electric fields (in wide ranges of their values), temperature in the range 1.7 to 400 K, and changes in $\gamma$-ray irradiation conditions. It is shown that, in the temperature range 400 to $\sim$100 K, electron mobility increases in accordance with the mechanism of electron scattering at an acoustic phonon, while, with a subsequent decrease in temperature to the temperature of liquid helium, mobility drops because the Coulomb scattering of electrons at charged surface centers starts to dominate. It is demonstrated that as a result of $\gamma$-ray irradiation, electron mobility decreases and the degree of this decrease strongly depends on the electrical mode of the sensor during irradiation.
Received: 03.10.2011
Accepted: 10.10.2011
English version:
Semiconductors, 2012, Volume 46, Issue 4, Pages 478–483
DOI: https://doi.org/10.1134/S1063782612040148
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Leonov, A. D. Mokrushin, N. M. Omelyanovskaya, “Features of electron mobility in a thin silicon layer in an insulator–silicon–insulator structure”, Fizika i Tekhnika Poluprovodnikov, 46:4 (2012), 494–499; Semiconductors, 46:4 (2012), 478–483
Citation in format AMSBIB
\Bibitem{LeoMokOme12}
\by A.~V.~Leonov, A.~D.~Mokrushin, N.~M.~Omelyanovskaya
\paper Features of electron mobility in a thin silicon layer in an insulator--silicon--insulator structure
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2012
\vol 46
\issue 4
\pages 494--499
\mathnet{http://mi.mathnet.ru/phts8212}
\elib{https://elibrary.ru/item.asp?id=20319134}
\transl
\jour Semiconductors
\yr 2012
\vol 46
\issue 4
\pages 478--483
\crossref{https://doi.org/10.1134/S1063782612040148}
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  • https://www.mathnet.ru/eng/phts/v46/i4/p494
  • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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