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Fizika i Tekhnika Poluprovodnikov, 2012, Volume 46, Issue 4, Pages 494–499
(Mi phts8212)
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This article is cited in 2 scientific papers (total in 2 papers)
Surface, interfaces, thin films
Features of electron mobility in a thin silicon layer in an insulator–silicon–insulator structure
A. V. Leonov, A. D. Mokrushin, N. M. Omelyanovskaya Institute of Microelectronics Technology and High-Purity Materials RAS
Abstract:
Electron mobility in a thin silicon layer of a metal-insulator-semiconductor-insulator-metal system is studied as a function of longitudinal and transverse electric fields (in wide ranges of their values), temperature in the range 1.7 to 400 K, and changes in $\gamma$-ray irradiation conditions. It is shown that, in the temperature range 400 to $\sim$100 K, electron mobility increases in accordance with the mechanism of electron scattering at an acoustic phonon, while, with a subsequent decrease in temperature to the temperature of liquid helium, mobility drops because the Coulomb scattering of electrons at charged surface centers starts to dominate. It is demonstrated that as a result of $\gamma$-ray irradiation, electron mobility decreases and the degree of this decrease strongly depends on the electrical mode of the sensor during irradiation.
Received: 03.10.2011 Accepted: 10.10.2011
Citation:
A. V. Leonov, A. D. Mokrushin, N. M. Omelyanovskaya, “Features of electron mobility in a thin silicon layer in an insulator–silicon–insulator structure”, Fizika i Tekhnika Poluprovodnikov, 46:4 (2012), 494–499; Semiconductors, 46:4 (2012), 478–483
Linking options:
https://www.mathnet.ru/eng/phts8212 https://www.mathnet.ru/eng/phts/v46/i4/p494
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