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Fizika i Tekhnika Poluprovodnikov, 2012, Volume 46, Issue 10, Pages 1368–1373
(Mi phts8358)
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This article is cited in 1 scientific paper (total in 1 paper)
Manufacturing, processing, testing of materials and structures
Growth of 4H silicon carbide crystals on a $(11\bar22)$ seed
A. Yu. Fadeeva, A. O. Lebedevb, Yu. M. Tairova a Saint Petersburg Electrotechnical University "LETI"
b Ioffe Institute, St. Petersburg
Abstract:
The features of the defect structure of 4H silicon carbide ingots grown by the modified Lely method on $(11\bar22)$-oriented seeds are studied. It is shown that this seed plane can be used to improve the structural quality of silicon carbide ingots. The defect structure of grown ingots features a complete lack of micropores and a decreased (by an order of magnitude) dislocation density in comparison with the seed. At the same time, growth on the $(11\bar22)$ seed results in stacking fault accumulation. The type of stacking faults corresponds to formula (5, 2) in the Zhdanov notation (internal Frank stacking fault).
Received: 10.04.2012 Accepted: 16.04.2012
Citation:
A. Yu. Fadeev, A. O. Lebedev, Yu. M. Tairov, “Growth of 4H silicon carbide crystals on a $(11\bar22)$ seed”, Fizika i Tekhnika Poluprovodnikov, 46:10 (2012), 1368–1373; Semiconductors, 46:10 (2012), 1346–1350
Linking options:
https://www.mathnet.ru/eng/phts8358 https://www.mathnet.ru/eng/phts/v46/i10/p1368
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