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Fizika i Tekhnika Poluprovodnikov, 2012, Volume 46, Issue 10, Pages 1368–1373 (Mi phts8358)  

This article is cited in 1 scientific paper (total in 1 paper)

Manufacturing, processing, testing of materials and structures

Growth of 4H silicon carbide crystals on a $(11\bar22)$ seed

A. Yu. Fadeeva, A. O. Lebedevb, Yu. M. Tairova

a Saint Petersburg Electrotechnical University "LETI"
b Ioffe Institute, St. Petersburg
Abstract: The features of the defect structure of 4H silicon carbide ingots grown by the modified Lely method on $(11\bar22)$-oriented seeds are studied. It is shown that this seed plane can be used to improve the structural quality of silicon carbide ingots. The defect structure of grown ingots features a complete lack of micropores and a decreased (by an order of magnitude) dislocation density in comparison with the seed. At the same time, growth on the $(11\bar22)$ seed results in stacking fault accumulation. The type of stacking faults corresponds to formula (5, 2) in the Zhdanov notation (internal Frank stacking fault).
Received: 10.04.2012
Accepted: 16.04.2012
English version:
Semiconductors, 2012, Volume 46, Issue 10, Pages 1346–1350
DOI: https://doi.org/10.1134/S1063782612100053
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. Yu. Fadeev, A. O. Lebedev, Yu. M. Tairov, “Growth of 4H silicon carbide crystals on a $(11\bar22)$ seed”, Fizika i Tekhnika Poluprovodnikov, 46:10 (2012), 1368–1373; Semiconductors, 46:10 (2012), 1346–1350
Citation in format AMSBIB
\Bibitem{FadLebTai12}
\by A.~Yu.~Fadeev, A.~O.~Lebedev, Yu.~M.~Tairov
\paper Growth of 4\emph{H} silicon carbide crystals on a $(11\bar22)$ seed
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2012
\vol 46
\issue 10
\pages 1368--1373
\mathnet{http://mi.mathnet.ru/phts8358}
\elib{https://elibrary.ru/item.asp?id=20319281}
\transl
\jour Semiconductors
\yr 2012
\vol 46
\issue 10
\pages 1346--1350
\crossref{https://doi.org/10.1134/S1063782612100053}
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  • https://www.mathnet.ru/eng/phts/v46/i10/p1368
  • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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