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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1988, Volume 14, Issue 3, Pages 247–250 (Mi pjtf1942)  
REDISTRIBUTION OF AFTER-PRESSURE DURING SUBLAYER PROFILING IN INGASBAS/GASB STRUCTURES

B. Z. Kushkimbaeva, B. A. Matveev, G. N. Talalakin, A. S. Filipchenko, E. I. Chaikina
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Document Type: Article
Language: Russian
Citation: B. Z. Kushkimbaeva, B. A. Matveev, G. N. Talalakin, A. S. Filipchenko, E. I. Chaikina, “REDISTRIBUTION OF AFTER-PRESSURE DURING SUBLAYER PROFILING IN INGASBAS/GASB STRUCTURES”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 14:3 (1988), 247–250
Citation in format AMSBIB
\Bibitem{MatTal88}
\by B.~Z.~Kushkimbaeva, B.~A.~Matveev, G.~N.~Talalakin, A.~S.~Filipchenko, E.~I.~Chaikina
\paper REDISTRIBUTION OF AFTER-PRESSURE DURING SUBLAYER PROFILING IN
INGASBAS/GASB STRUCTURES
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 1988
\vol 14
\issue 3
\pages 247--250
\mathnet{http://mi.mathnet.ru/pjtf1942}
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  • https://www.mathnet.ru/eng/pjtf/v14/i3/p247
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