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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2021, Volume 47, Issue 3, Pages 25–28
DOI: https://doi.org/10.21883/PJTF.2021.03.50571.18579 (Mi pjtf4869) 		 
This article is cited in 4 scientific papers (total in 4 papers)

The influence of the porosity of silicon layer on the elastic properties of hybrid SiC/Si substrates

A. A. Koryakina, Yu. A. Eremeevb, A. V. Osipovc, S. A. Kukushkincd

a St. Petersburg National Research University of Information Technologies, Mechanics and Optics
b Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, St. Petersburg
c Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, St. Petersburg
d Peter the Great St. Petersburg Polytechnic University
Full-text PDF (268 kB) Citations (4)
DOI: https://doi.org/10.21883/PJTF.2021.03.50571.18579
Abstract: In this work, the influence of porosity of silicon layer with macropores on elastic and thermomechanical properties of SiC/Si substrates synthesized by the atom substitution method has been studied. Calculation of elastic constants of porous silicon has been performed by the finite element method. The results of calculation of the Young's modulus in [111] direction are in agreement with the estimates obtained by the nanoindentation method of SiC/Si(111) substrates. The proposed theoretical model can be used for determination of elastic properties of SiC/Si substrates of different orientation.
Keywords: porous silicon, silicon carbide, elastic properties.
Funding agency Grant number
Russian Science Foundation 20-12-00193
This study was carried out within the framework of the Russian Science Foundation, project no. 20-12-00193.
Received: 12.10.2020
Revised: 20.10.2020
Accepted: 20.10.2020
English version:
Technical Physics Letters, Volume 47, Issue 2, Pages 126–129
DOI: https://doi.org/10.1134/S1063785021020085
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. A. Koryakin, Yu. A. Eremeev, A. V. Osipov, S. A. Kukushkin, “The influence of the porosity of silicon layer on the elastic properties of hybrid SiC/Si substrates”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:3 (2021), 25–28; Tech. Phys. Lett., 47:2, 126–129
Citation in format AMSBIB
\Bibitem{KorEreOsi21}
\by A.~A.~Koryakin, Yu.~A.~Eremeev, A.~V.~Osipov, S.~A.~Kukushkin
\paper The influence of the porosity of silicon layer on the elastic properties of hybrid SiC/Si substrates
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2021
\vol 47
\issue 3
\pages 25--28
\mathnet{http://mi.mathnet.ru/pjtf4869}
\crossref{https://doi.org/10.21883/PJTF.2021.03.50571.18579}
\elib{https://elibrary.ru/item.asp?id=44872058}
\transl
\jour Tech. Phys. Lett.
\vol 47
\issue 2
\pages 126--129
\crossref{https://doi.org/10.1134/S1063785021020085}
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    • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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