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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 45, Issue 12, Pages 26–29
DOI: https://doi.org/10.21883/PJTF.2019.12.47914.17798 (Mi pjtf5405) 		 
Study of multilayer thin film structures by Rutherford backscattering spectrometry

V. I. Bachurin, N. S. Melesov, E. O. Parshin, A. S. Rudyi, A. B. Churilov

K.A. Valiev Institute of Physics and Technology (Yaroslavl Branch), Russian Academy of Sciences, Yaroslavl, Russia
Full-text PDF (247 kB)
DOI: https://doi.org/10.21883/PJTF.2019.12.47914.17798
Abstract: We have evaluated possibilities of using the method of Rutherford backscattering spectrometry (RBS) for depth profiling of multilayer thin-film structures containing nanodmensional layers of elements with close atomic masses. It is established that RBS measurements can ensure high precision determination of the composition of these multilayer structures, total film thickness, and thicknesses of separate layers. This ability can be used for the input quality control of multilayer structures used in micro- and nanotechnologies.
Keywords: multilayer thin-film structures, depth profiling, Rutherford backscattering spectrometry.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 0066-2019-0003
Received: 20.03.2019
Revised: 20.03.2019
Accepted: 25.03.2019
English version:
Technical Physics Letters, 2019, Volume 45, Issue 6, Pages 609–612
DOI: https://doi.org/10.1134/S1063785019060191
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. I. Bachurin, N. S. Melesov, E. O. Parshin, A. S. Rudyi, A. B. Churilov, “Study of multilayer thin film structures by Rutherford backscattering spectrometry”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:12 (2019), 26–29; Tech. Phys. Lett., 45:6 (2019), 609–612
Citation in format AMSBIB
\Bibitem{BacMelPar19}
\by V.~I.~Bachurin, N.~S.~Melesov, E.~O.~Parshin, A.~S.~Rudyi, A.~B.~Churilov
\paper Study of multilayer thin film structures by Rutherford backscattering spectrometry
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 45
\issue 12
\pages 26--29
\mathnet{http://mi.mathnet.ru/pjtf5405}
\crossref{https://doi.org/10.21883/PJTF.2019.12.47914.17798}
\elib{https://elibrary.ru/item.asp?id=41131059}
\transl
\jour Tech. Phys. Lett.
\yr 2019
\vol 45
\issue 6
\pages 609--612
\crossref{https://doi.org/10.1134/S1063785019060191}
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