Forming dense arrays of gold nanoparticles in thin films of yttria stabilized zirconia by magnetron sputtering

Layers of Au nanoparticles (NPs) were formed in films of yttria stabilized zirconia (YSZ) on fusedquartz substrates by layer-by-layer magnetron deposition with subsequent annealing. The obtained structures were studied by applying high-resolution transmission electron microscopy (TEM) to transverse sections and using optical absorption spectroscopy. TEM studies revealed the formation of Au NPs with a diameter of 2–3 nm concentrated in a thin layer within the YSZ film. The optical absorption spectra of the studied samples exhibited peaks of resonance plasmon absorption in Au NPs with a maximum wavelength of $\sim$650 nm. The dependences of geometric and structural parameters of Au NP arrays (size, density, thickness of the Au NP layer, etc.) on the formation conditions were determined, and the regimes of fabrication of dense Au NP arrays that allow for collective plasmon excitations were identified.