Elastic and inelastic scattering of atomic oxygen on molecular oxygen for relative kinetic energies of 10–6000 cm$^{-1}$

The elastic and inelastic scattering cross sections of the O$(^3P_g)$+O$_2(^3\Sigma_g^-)$ system for the first vibrational levels of the O$_2$ molecule were calculated quantum-mechanically on the ground O$_3(^1A')$, surface obtained using the multi-reference configurational interaction method (MRCI/AVQZ-F12). The obtained scattering cross sections can be used for excitation and relaxation rates calculations of O$_2$ molecule ro-vibrational levels by atomic oxygen, which are necessary for modeling low-temperature plasma containing oxygen, for example, in gas discharge lasers and etching chambers.