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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2023, Volume 49, Issue 6, Pages 35–38
DOI: https://doi.org/10.21883/PJTF.2023.06.54815.19445 (Mi pjtf6943) 		 
Discharge of heavy noble gases induced by pulsed gyrotron radiation with 1 THz frequency

A. P. Veselov, A. V. Sidorov, Yu. K. Kalynov, A. V. Vodopyanov

Federal Research Center A.V. Gaponov-Grekhov Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod, Russia
Full-text PDF (114 kB)
DOI: https://doi.org/10.21883/PJTF.2023.06.54815.19445
Abstract: In this work, gas discharge ignited by girotron radiation with frequency 1 THz was carried out. Breakdown curves were calculated both for selfignited and initiated discharges. There was shown that in a case of breakdown by the pulse radiation with duration longer than several microseconds electric field threshold is the same as in a case of continuous wave breakdown. Also, the possibility of using a terahertz gyrotron as a radiation source for discharge in gas targets on installations for extreme ultraviolet photolithography was assessed.
Keywords: girotron, terahertz breakdown, extreme ultraviolet lithography.
Funding agency Grant number
Russian Science Foundation 19-19-00599
This study was supported by the Russian Science Foundation (grant No. 19-19-00599).
Received: 30.11.2022
Revised: 30.12.2022
Accepted: 13.01.2023
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. P. Veselov, A. V. Sidorov, Yu. K. Kalynov, A. V. Vodopyanov, “Discharge of heavy noble gases induced by pulsed gyrotron radiation with 1 THz frequency”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 49:6 (2023), 35–38
Citation in format AMSBIB
\Bibitem{VesSidKal23}
\by A.~P.~Veselov, A.~V.~Sidorov, Yu.~K.~Kalynov, A.~V.~Vodopyanov
\paper Discharge of heavy noble gases induced by pulsed gyrotron radiation with 1 THz frequency
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2023
\vol 49
\issue 6
\pages 35--38
\mathnet{http://mi.mathnet.ru/pjtf6943}
\crossref{https://doi.org/10.21883/PJTF.2023.06.54815.19445}
\elib{https://elibrary.ru/item.asp?id=50409154}
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