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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2023, Volume 49, Issue 11, Pages 34–38
DOI: https://doi.org/10.21883/PJTF.2023.11.55536.19447 (Mi pjtf6999) 		 
This article is cited in 4 scientific papers (total in 4 papers)

Preferential sputtering of NiTi alloy by atomic and gas cluster ions

A. E. Ieshkina, V. S. Chernysha, D. S. Kireeva, B. R. Senatulinb, E. A. Skrylevab

a Lomonosov Moscow State University, Moscow, Russia
b National University of Science and Technology «MISIS», Moscow, Russia
Full-text PDF (259 kB) Citations (4)
DOI: https://doi.org/10.21883/PJTF.2023.11.55536.19447
Abstract: X-ray photoelectron spectroscopy was used to study the evolution of the NiTi alloy surface composition under bombardment with atomic and cluster argon ions. A strong enrichment of the surface with nickel was found for both atomic and cluster ions, which is inconsistent with contemporary understanding of preferential sputtering. Possible reasons for this result are discussed.
Keywords: ion sputtering, cluster ions, preferential sputtering, XPS.
Funding agency Grant number
Russian Science Foundation 21-19-00310
The study was supported by the Russian Science Foundation, project № 21-19-00310 (https://rscf.ru/en/project/21-19-00310/).
Received: 01.12.2022
Revised: 11.01.2023
Accepted: 17.04.2023
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. E. Ieshkin, V. S. Chernysh, D. S. Kireev, B. R. Senatulin, E. A. Skryleva, “Preferential sputtering of NiTi alloy by atomic and gas cluster ions”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 49:11 (2023), 34–38
Citation in format AMSBIB
\Bibitem{IesCheKir23}
\by A.~E.~Ieshkin, V.~S.~Chernysh, D.~S.~Kireev, B.~R.~Senatulin, E.~A.~Skryleva
\paper Preferential sputtering of NiTi alloy by atomic and gas cluster ions
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2023
\vol 49
\issue 11
\pages 34--38
\mathnet{http://mi.mathnet.ru/pjtf6999}
\crossref{https://doi.org/10.21883/PJTF.2023.11.55536.19447}
\elib{https://elibrary.ru/item.asp?id=53838510}
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    • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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