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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2023, Volume 49, Issue 16, Pages 25–28
DOI: https://doi.org/10.21883/PJTF.2023.16.55964.19610 (Mi pjtf7051) 		 
Local laser oxidation of porous silicon photonic crystals

L. G. Kuznetsov, N. I. Pyshkov, S. E. Svyakhovskii

Lomonosov Moscow State University, Moscow, Russia
Full-text PDF (266 kB)
DOI: https://doi.org/10.21883/PJTF.2023.16.55964.19610
Abstract: The process of thermal oxidation of porous silicon photonic crystals by laser treatment has been studied experimentally and theoretically. The temperature of laser heating was calculated by solving of the non-stationary thermal conductivity equation. The degree of silicon oxidation was estimated experimentally by measuring the spectral shift of the reflection curve of photonic crystals. We demonstrate the controllable shift of the photonic band gap of porous silicon photonic crystals made by means of laser irradiation.
Keywords: porous silicon, photonic crystals, local laser oxidation, laser surface treatment.
Funding agency Grant number
Russian Science Foundation 21-72-10103
This study was supported by a grant from the Russian Science Foundation (project 21-72-10103, https://rscf.ru/en/project/21-72-10103/).
Received: 27.04.2023
Revised: 10.06.2023
Accepted: 10.06.2023
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: L. G. Kuznetsov, N. I. Pyshkov, S. E. Svyakhovskii, “Local laser oxidation of porous silicon photonic crystals”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 49:16 (2023), 25–28
Citation in format AMSBIB
\Bibitem{KuzPysSvy23}
\by L.~G.~Kuznetsov, N.~I.~Pyshkov, S.~E.~Svyakhovskii
\paper Local laser oxidation of porous silicon photonic crystals
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2023
\vol 49
\issue 16
\pages 25--28
\mathnet{http://mi.mathnet.ru/pjtf7051}
\crossref{https://doi.org/10.21883/PJTF.2023.16.55964.19610}
\elib{https://elibrary.ru/item.asp?id=54185936}
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