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N$_2$ plasma interaction with molybdenum disulfide monolayers
S. A. Khlebnikovab, A. A. Solovykhab, Yu. A. Mankelevicha, E. N. Voroninaab a Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics, Moscow, Russia
b Lomonosov Moscow State University, Moscow, Russia
Abstract:
Based on ab initio DFT simulation results, the main processes of the interaction of thermal N atoms with MoS$_2$ monolayers are revealed, potential mechanisms of defect formation by low-energy ions N$_2^+$ are described, and the ion threshold energy required to sulfur removal is estimated.
Keywords:
molybdenum disulfide, monolayer, plasma, radicals, ions, simulation.
Received: 25.05.2023 Revised: 13.07.2023 Accepted: 13.07.2023
Citation:
S. A. Khlebnikov, A. A. Solovykh, Yu. A. Mankelevich, E. N. Voronina, “N$_2$ plasma interaction with molybdenum disulfide monolayers”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 49:18 (2023), 8–11
Linking options:
https://www.mathnet.ru/eng/pjtf7069 https://www.mathnet.ru/eng/pjtf/v49/i18/p8
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