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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2022, Volume 48, Issue 2, Pages 37–40
DOI: https://doi.org/10.21883/PJTF.2022.02.51920.18923 (Mi pjtf7213) 		 
This article is cited in 1 scientific paper (total in 1 paper)

Investigation of the effect of hydrogen content on the conductivity of nanocrystalline diamond films

O. A. Ivanova, A. L. Vikhareva, S. A. Bogdanova, N. M. Ovechkina, V. P. Loginovb, Yu. A. Yakovlevb, A. Ya. Vul'c

a Federal Research Center A.V. Gaponov-Grekhov Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod, Russia
b Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, St. Petersburg, Russia
c Ioffe Institute, St. Petersburg, Russia
Full-text PDF (379 kB) Citations (1)
DOI: https://doi.org/10.21883/PJTF.2022.02.51920.18923
Abstract: The results are presented for investigation of electrical conductivity of nanocrystalline diamond (NCD) films with thickness of 0.5–0.6 microns grown on silicon Si(100) substrates by the CVD method using methane-hydrogen and methane-hydrogen-oxygen mixtures. By the method of heating in vacuum with using hydrogen analyzer AB-1, the concentration of hydrogen in the studied films was determined and the relationship between the content of hydrogen in the NCD film and its conductivity was estimated. It has been shown that high-temperature processing in vacuum at the temperature of 600$^\circ$C leads to desorption of hydrogen from the films and to a significant increase in their resistance.
Keywords: nanocrystalline diamond, thin diamond films, electrical properties of films, hydrogen content.
Funding agency Grant number
Ministry of Science and Higher Education of the Russian Federation 0030-2021-0003
The study was accomplished in the framework of State Assignment of the Institute of Applied Physics RAS (project № 0030-2021-0003).
Received: 16.06.2021
Revised: 11.10.2021
Accepted: 11.10.2021
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: O. A. Ivanov, A. L. Vikharev, S. A. Bogdanov, N. M. Ovechkin, V. P. Loginov, Yu. A. Yakovlev, A. Ya. Vul', “Investigation of the effect of hydrogen content on the conductivity of nanocrystalline diamond films”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 48:2 (2022), 37–40
Citation in format AMSBIB
\Bibitem{IvaVikBog22}
\by O.~A.~Ivanov, A.~L.~Vikharev, S.~A.~Bogdanov, N.~M.~Ovechkin, V.~P.~Loginov, Yu.~A.~Yakovlev, A.~Ya.~Vul'
\paper Investigation of the effect of hydrogen content on the conductivity of nanocrystalline diamond films
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2022
\vol 48
\issue 2
\pages 37--40
\mathnet{http://mi.mathnet.ru/pjtf7213}
\crossref{https://doi.org/10.21883/PJTF.2022.02.51920.18923}
\elib{https://elibrary.ru/item.asp?id=47276871}
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    • This publication is cited in the following 1 articles:
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