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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2022, Volume 48, Issue 12, Pages 15–18
DOI: https://doi.org/10.21883/PJTF.2022.12.52672.19224 (Mi pjtf7331) 		 
Synthesis of Au/Si nanostructures by STM lithography

D. V. Lebedevabc, V. A. Shkoldinad, A. M. Mozharovb, A. E. Petukhovb, A. O. Golubokc, A. V. Arkhipove, I. S. Mukhinae, V. G. Dubrovskiib

a Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, St. Petersburg, Russia
b Saint Petersburg State University, St. Petersburg, Russia
c Institute for Analytical Instrumentation, Russian Academy of Sciences, St. Petersburg, Russia
d ITMO University, St. Petersburg, Russia
e Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia
Full-text PDF (292 kB)
DOI: https://doi.org/10.21883/PJTF.2022.12.52672.19224
Abstract: A technique for synthesizing nanostructures by current lithography in a scanning tunneling microscope (STM lithography) in layered Au/Si structures has been developed. An experimental dependence of the geometric dimensions of the created nanostructures on the time of current STM lithography has been obtained. A theoretical model for the growth of nanostructures is proposed, which explains the nonlinear dependence of the radius of the obtained nanostructures on time with saturation in the region of large radii.
Keywords: Au/Si nanostructures, STM lithography, growth rate, modeling.
Funding agency Grant number
Russian Science Foundation 21-79-10346
Saint Petersburg State University 75746688
The study was supported by the Russian Scientific Foundation (project № 21-79-10346). The modeling was supported by the SPbSU grant No 75746688.
Received: 15.04.2022
Revised: 26.04.2022
Accepted: 29.04.2022
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: D. V. Lebedev, V. A. Shkoldin, A. M. Mozharov, A. E. Petukhov, A. O. Golubok, A. V. Arkhipov, I. S. Mukhin, V. G. Dubrovskii, “Synthesis of Au/Si nanostructures by STM lithography”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 48:12 (2022), 15–18
Citation in format AMSBIB
\Bibitem{LebShkMoz22}
\by D.~V.~Lebedev, V.~A.~Shkoldin, A.~M.~Mozharov, A.~E.~Petukhov, A.~O.~Golubok, A.~V.~Arkhipov, I.~S.~Mukhin, V.~G.~Dubrovskii
\paper Synthesis of Au/Si nanostructures by STM lithography
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2022
\vol 48
\issue 12
\pages 15--18
\mathnet{http://mi.mathnet.ru/pjtf7331}
\crossref{https://doi.org/10.21883/PJTF.2022.12.52672.19224}
\elib{https://elibrary.ru/item.asp?id=48708381}
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