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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2022, Volume 48, Issue 19, Pages 16–19
DOI: https://doi.org/10.21883/PJTF.2022.19.53589.19279
(Mi pjtf7409)
 

Investigation of metal–insulator–semiconductor structure based on CdHgTe and HfO$_2$

D. V. Gorshkov, E. R. Zakirov, G. Yu. Sidorov, I. V. Sabinina, D. V. Marin

Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk, Russia
Abstract: The interface between Cd$_{0.22}$Hg$_{0.78}$Te and HfO$_2$ grown by plasma-enhanced atomic layer deposition at a temperature of 120$^\circ$C in a specifically optimized deposition mode has been studied. The method used in this work for measuring the admittance of metal–dielectric–semiconductor structures made it possible to establish that their electrophysical parameters are uniform over the sample surface. The spectrum of fast surface states density at the HfO$_2$–Cd$_{0.22}$Hg$_{0.78}$Te interface has been calculated.
Keywords: CdHgTe, HfO$_2$, ALD, C–V, passivating coating.
Funding agency Grant number
Russian Science Foundation 21-72-10134
This work was supported by grant No. 21-72-10134 from the Russian Science Foundation.
Received: 14.06.2022
Revised: 11.08.2022
Accepted: 17.08.2022
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: D. V. Gorshkov, E. R. Zakirov, G. Yu. Sidorov, I. V. Sabinina, D. V. Marin, “Investigation of metal–insulator–semiconductor structure based on CdHgTe and HfO$_2$”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 48:19 (2022), 16–19
Citation in format AMSBIB
\Bibitem{GorZakSid22}
\by D.~V.~Gorshkov, E.~R.~Zakirov, G.~Yu.~Sidorov, I.~V.~Sabinina, D.~V.~Marin
\paper Investigation of metal--insulator--semiconductor structure based on CdHgTe and HfO$_2$
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2022
\vol 48
\issue 19
\pages 16--19
\mathnet{http://mi.mathnet.ru/pjtf7409}
\crossref{https://doi.org/10.21883/PJTF.2022.19.53589.19279}
\elib{https://elibrary.ru/item.asp?id=49498806}
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