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Investigation of metal–insulator–semiconductor structure based on CdHgTe and HfO$_2$
D. V. Gorshkov, E. R. Zakirov, G. Yu. Sidorov, I. V. Sabinina, D. V. Marin Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk, Russia
Abstract:
The interface between Cd$_{0.22}$Hg$_{0.78}$Te and HfO$_2$ grown by plasma-enhanced atomic layer deposition at a temperature of 120$^\circ$C in a specifically optimized deposition mode has been studied. The method used in this work for measuring the admittance of metal–dielectric–semiconductor structures made it possible to establish that their electrophysical parameters are uniform over the sample surface. The spectrum of fast surface states density at the HfO$_2$–Cd$_{0.22}$Hg$_{0.78}$Te interface has been calculated.
Keywords:
CdHgTe, HfO$_2$, ALD, C–V, passivating coating.
Received: 14.06.2022 Revised: 11.08.2022 Accepted: 17.08.2022
Citation:
D. V. Gorshkov, E. R. Zakirov, G. Yu. Sidorov, I. V. Sabinina, D. V. Marin, “Investigation of metal–insulator–semiconductor structure based on CdHgTe and HfO$_2$”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 48:19 (2022), 16–19
Linking options:
https://www.mathnet.ru/eng/pjtf7409 https://www.mathnet.ru/eng/pjtf/v48/i19/p16
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